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Product detail:CTI Cryo-Torr 400 On-Board Cryopump.
* CTI-Cryogenics' pioneering cryopumps with fully integrated controls and supporting peripherals speeds integration and system operation
* Consistent process performance
* Higher tool productivity via significantly increased cryopump uptime
* Regenerates in half to one-third the time of a typical Cryo-Torr® cryopump application
* Fast Regen capability extends cryopump performance between regenerations
On-Board cryogenic vacuum pumps incorporate embedded microprocessor control to enhance performance, perform diagnostic routines and provide communication capability. On-Board solutions include sophisticated software and easy-to-use graphical user interfaces to significantly improve the performance and operation of the cryopump. Today, the On-Board Cryopump is the standard of the world for reliability and performance.
Pumping Speeds - liters/sec.
Water Vapor 17,500
Air 6,000
Hydrogen 12,000
Argon 5,000
Capacity - std. liter
Argon 2,500
Hydrogen (5x10-6 Torr) 42
Nominal Regeneration Time (cold to cold)
First & Second Stage 3 hrs
Second Stage <1.5 hrs
