Click for original picture
Legal status confirmed
Product detail:
A given FAB has to be concerned with hundreds and even thousands of recipes. Automating recipes downloading, uploading, and version control is a must than a luxury. Product scraps is not an uncommon phenomena in many FABs due to wrong recipes applied, as human errors are unavoidable.
Current recipe management has been equipment type based at best. Such point based approach gives rise to many new issues - many systems (inconsistent) to manage, costly to acquire, high training and maintenance costs, plant-wide process correlation is hard to achieve etc.
Open-I's openPMC_plus is designed to address precisely such issues. With a generic architecture, it can be easily adapted for each equipment type, for example in backend FAB, recipes from Pre-assembly equipments, FOL (DB, WB, Oven, ..) to EOL (Mold, Laser Marking, ) .. etc, can be managed in a centralized, and consistent way eliminating all the shortcomings of the point, or, equipment vendors approach.
Integrated into the recipe management system is the Bond Process Monitoring option of the Parameters Management & Control system that ensure not only the correct version of recipe is selected and downloaded, any in-process change of parameters that is out of the process guardband can be eliminated.
