CTI Cryo-Torr 400 On-Board Cryopump.

    * CTI-Cryogenics' pioneering cryopumps with fully integrated controls and supporting peripherals speeds integration and system operation
    * Consistent process performance
    * Higher tool productivity via significantly increased cryopump uptime
    * Regenerates in half to one-third the time of a typical Cryo-Torr® cryopump application
    * Fast Regen capability extends cryopump performance between regenerations

On-Board cryogenic vacuum pumps incorporate embedded microprocessor control to enhance performance, perform diagnostic routines and provide communication capability. On-Board solutions include sophisticated software and easy-to-use graphical user interfaces to significantly improve the performance and operation of the cryopump. Today, the On-Board Cryopump is the standard of the world for reliability and performance.
Pumping Speeds - liters/sec.
Water Vapor     17,500
Air     6,000
Hydrogen     12,000
Argon     5,000
Capacity - std. liter
Argon     2,500
Hydrogen (5x10-6 Torr)     42
Nominal Regeneration Time (cold to cold)
First & Second Stage     3 hrs
Second Stage     <1.5 hrs